首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures >Study of direct current characteristics of carbon-doped GaInP/GaAs heterojunction bipolar transistor grown by solid source molecular beam epitaxy
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Study of direct current characteristics of carbon-doped GaInP/GaAs heterojunction bipolar transistor grown by solid source molecular beam epitaxy

机译:固体源分子束外延生长碳掺杂GaInP / GaAs异质结双极晶体管的直流特性研究

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This article reports the dc characteristics of a GalnP/GaAs heterojunction bipolar transistor (HBT) with carbon-doped GaAs base layer grown by solid source molecular beam epitaxy using carbon tetrabromide (CBr_4) as p-type dopant precursor. Hydrofluoric acid (HF) was used to passivate the GaInP/GaAs HBTs. At base bias voltages below 0.9 V in the Gummel plot, the base current of large area devices after HF passivation, was greatly reduced indicating that the extrinsic base surface recombination current was significantly reduced. After HF passivation, detailed dc characterization of the device performance within the temperature range of 300-380 K was carried out, and the carrier transport properties were investigated. The base current and collector current ideality factors at 300 K were 1.12 and 1.01, respectively. This indicates that a space charge region recombination current is insignificant in the base. From the temperature dependent Gummel plot, the activation energies of the collector current and base current were obtained. For the collector current, the activation energy is 1.4 eV, which is close to the band gap of the GaAs base. This indicates that the collector current is determined by the drift-diffusion process. For the base current, the activation energy is also 1.4 eV, indicating that band-to-band recombination plays a dominant role in the base current. No trap-related recombination was observed in the base and collector currents, which further indicates the good base material quality in the HBT structure. The current gain versus collector current characteristics at different temperatures were also investigated and analyzed.
机译:本文报道了通过使用四溴化碳(CBr_4)作为p型掺杂剂前驱体,通过固态源分子束外延生长的具有碳掺杂的GaAs基层的GalnP / GaAs异质结双极晶体管(HBT)的直流特性。氢氟酸(HF)用于钝化GaInP / GaAs HBT。在Gummel图中低于0.9 V的基极偏置电压下,HF钝化后大面积器件的基极电流大大降低,这表明外部基极表面重组电流显着降低。 HF钝化后,在300-380 K的温度范围内进行了器件性能的详细dc表征,并研究了载流子传输性能。 300 K时的基极电流和集电极电流理想因数分别为1.12和1.01。这表明在基极中空间电荷区域复合电流微不足道。从与温度有关的古梅尔曲线,可以得到集电极电流和基极电流的激活能。对于集电极电流,激活能量为1.4 eV,接近GaAs基极的带隙。这表明集电极电流由漂移扩散过程确定。对于基极电流,激活能量也为1.4 eV,表明带间重组在基极电流中起主要作用。在基极和集电极电流中未观察到陷阱相关的重组,这进一步表明在HBT结构中良好的基体材料质量。还研究和分析了不同温度下电流增益与集电极电流的关系。

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