Micromachined piezoresistive proximal probe with integrated bimorph actuator for aligned single ion implantation

摘要

The authors report a microfabrication procedure of self-actuated piezoresistive scanning probes (SAPSPs). They are designed for a SAPSP instrument that is integrated with an ion beam for aligned single ion implantation in ultrahigh vacuum. The novelty of the design is an integrated hollow pyramid, instead of a. previously mechanically hand mounted pyramid [J. Vac.. Sci. Technol. B 23, 2798 (2005)]. The pyramid has dual purpose. First it collimates the ion beam and suppresses secondary particles from the back side of the cantilever, so that secondary particles from the target material can be used for single ion detection. Second the pyramid also provides an atomic force microscope tip for the scanning probe. A crucial step in the fabrication is the back side opening via etching for the hollow pyramid. The fabrication procedure will be discussed in detail. (c) 2006 American Vacuum Society.