MICROCANTILEVER SENSOR WITH BIMORPH ACTUATION AND PIEZORESISTIVE READ-OUT

摘要

There is provided a method of monitoring one or more specified reactions in a fluid medium sample using a thermal signature, comprising providing at least one micro-cantilever sensor, said micro-cantilever sensor comprising at least two materials having different coefficients of thermal expansion, and having a heater and piezo-resistive sensor integrated therein, calibrating the at least one micro-cantilever response to thermal changes to form a calibrated micro-cantilever response characteristic, starting the specified reaction in the fluid medium sample, pulsing the heater with one or more electrical pulses to induce heat generation in the micro-cantilever, sampling the output of the integrated piezo-resistive sensor to characterize a response of the micro-cantilever during the specified reaction in the fluid medium, and subtracting the calibrated micro-cantilever response characteristic from the sampled output to determine a characteristic of the one or more specified reactions in the fluid medium sample. There is also provided a method for measuring at least one thermal property of a fluid medium sample, and a fluid medium sample reaction detection apparatus.