机译:使用双面(结构化)光掩模进行掩模对准器光刻的硅通孔制造的优化光刻工艺
Friedrich-Schiller-Universitaet, Institute of Applied Physics, Abbe Center of Photonics, Albert-Einstein-Street 15, Jena 07745, Germany;
Friedrich-Schiller-Universitaet, Institute of Applied Physics, Abbe Center of Photonics, Albert-Einstein-Street 15, Jena 07745, Germany;
Friedrich-Schiller-Universitaet, Institute of Applied Physics, Abbe Center of Photonics, Albert-Einstein-Street 15, Jena 07745, Germany,Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Street 7, Jena 07745, Germany;
mask aligner lithography; through-silicon vias; photomask fabrication; e-beam lithography;
机译:掩模对准仪光刻仿真-从光刻仿真到工艺验证
机译:定制照明,可在掩模对准仪光刻系统中优化工艺窗口并提高良率
机译:使用掩膜对准器的闪光压印光刻:一种在光敏水凝胶中印刷纳米结构的方法
机译:使用双面(结构化)光掩模的TSV结构的掩模对准器光刻
机译:利用基于图像的格式,以优化模式数据格式和掩模和掩模模式生成光刻的处理
机译:高度对准的聚合物纳米线蚀刻掩模光刻可实现石墨烯纳米孔晶体管的整合
机译:采用双面(结构化)光掩模制作硅通孔制造的优化光刻工艺,用于掩模对准器光刻