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机译:含金属光刻胶在极紫外光下的吸收系数
Paul Scherrer Institute, Villigen, Switzerland;
Advanced Research Center for Nanolithography, Amsterdam, The Netherlands;
Advanced Research Center for Nanolithography, Amsterdam, The Netherlands;
Advanced Research Center for Nanolithography, Amsterdam, The Netherlands;
Advanced Research Center for Nanolithography, Amsterdam, The Netherlands,University of Amsterdam, van't Hoff Institute for Molecular Sciences, Amsterdam, The Netherlands;
Paul Scherrer Institute, Villigen, Switzerland;
extreme ultraviolet; absorption; ligand; tin cage; oxocluster; metal oxide; photoresist; stochastics;
机译:通过薄膜传递方法在极端紫外(EUV)波长下的光致抗蚀剂吸收测量
机译:薄膜透射法在极紫外(EUV)波长下的光刻胶吸收测量
机译:化学放大抗蚀剂和非化学放大抗蚀剂在极紫外下的动态吸收系数
机译:光刻胶中极紫外辐射的吸收测量
机译:使用先进的计量学和拟合技术对极端紫外光刻光刻胶进行表征。
机译:一种具有详细校准的精确方法用于确定吸收系数; α-胡萝卜素β-胡萝卜素和番茄红素的可见光和紫外吸收光谱的定量测量
机译:薄膜透射法在极端紫外(EUV)波长下的光致抗蚀剂吸收测量