Crystallography and structural evolution of LiNbO_3 and LiNb_1-xTa_xO_3 films on sapphire prepared by high-rate Thermal plasma spray chemical vapor deposition

摘要

The structure and the crystallography of lithium niobate and lithium niobate-tantalate thin films (0.2-1.0 μm in thickness) with the tantalum composition range of 0 ≤ x ≤0.5 grown on (0001) sapphire substrate by thermal plasma spray chemical vapor deposition have been studied by means of cross-sectional high-resolution transmission electron microscopy and x-ray diffraction.