Influence of Fe-doped on structural, electronic structural and optical properties of hydrogenated amorphous carbon films prepared by plasma enhanced chemical vapor deposition

摘要

Fe-doped hydrogenated amorphous carbon (a-C:H:Fe) films were deposited from an isobutene/ferrocene/ H_2 gas mixture by plasma enhanced chemical metal organic vapor deposition. Raman spectra were used to characterize the bonding structure of the a-C:H:Fe films and hydrogenated amorphous carbon (a-C:H) films. Optical properties were investigated by the UV-vis spectroscopy and the photoluminescence spectra. The number of six-numbered rings of the a-C:H films increases and sp~2 clustering of the films decreases after Fe-doping. The Tauc optical gap of the a-C:H:Fe films becomes narrower by 0.15-0.23 eV relative to the value of the a-C:H films. The narrowing of the optical gap after doping is attributed primarily to the extended state around the Fe deep level in the band gap and the narrowing of the pi and pi* band edge states because of the increase of the number of six-numbered rings in the a-C:H films. Fe deep level defects of the a-C:H:Fe films contribute chiefly to non-radiative recombination.