Active Optical Fiber Alignment with a Piezoelectric Ultrasonic Motor Integrated Into Low Temperature Cofired Ceramics

摘要

The major goal of this research was to integrate an ultrasonic motor into a ceramic package for an active optical fiber alignment. Two degrees of freedom ultrasonic motor was successfully cofired with commercial low temperature cofired ceramic green tapes as well as with silver electrodes without encountering serious delamination, camber, and inter diffusion issues. High-power piezoelectric ceramics that can be sintered at 900℃ was used for the ultrasonic motor. The motor successfully achieved fiber-to-laser optical alignment. Once alignment was achieved, a pre-stressed structure maintained the position of the fiber without any external electrical field or adhesive material. This package design provided a unique ability to adjust and realign an optical fiber.