Process Modeling and Simulation for Hg_(1-x)Cd_xTe. Part Ⅰ: Status of Stanford University Mercury Cadmium Telluride Process Simulator

摘要

Details are provided concerning the basic point defect parameter set of the Stanford University mercury cadmium telluride process simulator (SUMerCad). The Hg interstitial and vacancy parameters are presented and justified for x = 0.2 material. In particular, values for the thermodynamic limits, diffusion coefficients, recombination rates, generation rates, and boundary conditions are specified and their determination methodology is reviewed. The parameters have been determined for overall consistency with a specific pool of experimental results which include studies of Hg self-diffusion, type-conversion, and the existence region. Our presentation will review the current state of the Hg_(1-x)Cd_xTe modeling effort, and outline the future direction of the simulator, providing examples and discussion. Finally, some issues related to the future development of SUMerCad are discussed, including electric field effects, general boundary conditions, alternative junction formation processes, extended defects, and interdiffusion.