Structure and residual stress in γ-LiAlO_2 layer fabricated by vapor transport equilibration on (0001) sapphire

摘要

γ-LiAlO_2 layers with a highly preferred (100) orientation were prepared by vapor transport equilibration (VTE) technique on (0001) sapphire substrate. Microstructure of the γ-LiAlO_2 layers was studied by XRD and SEM. In the temperature range from 750 to 1100℃, the residual stress in the γ-LiAlO_2 layers varied from tensile to compressive with the increase of VTE temperature, and the critical point of the change between tensile and compressive stress is around 975℃.