A two-dimensional analytical subthreshold behavior analysis including hot-carrier effect for nanoscale Gate Stack Gate All Around (GASGAA) MOSFETs

摘要

The Gate All Around (GAA) MOSFET is considered as one of the most promising devices for downscal-ing below 50 nm. By surrounding the channel completely, the gate gains increased electrostatic control of the channel and short-channel-effects (SCEs) can be drastically suppressed. However, challenges still remain to resolve the important issues particularly concerning hot-carrier reliability and accurate device models for nanoscale circuit designs. Hot-carrier effects have been the major issues in the long-term stability of subthreshold performances in a nanoscale MOS transistor. In this paper we present a two-dimensional analytical analysis of the subthreshold behavior, subthreshold current and subthreshold swing, including the interfacial hot-carrier effects. The calculated results of the proposed approach match well with those of the 2-D numerical device simulator. The present work provides valuable design insights in the performance of nanoscale CMOS-based devices including hot-carrier degradation effects.