Controlling the ON-resistance in SOI LDMOS using parasitic bipolar junction transistor

摘要

We present a new parasitic bipolar junction transistor (BJT) enhanced silicon on insulator (SOI) laterally double diffused metal oxide semiconductor (LDMOS), called BJT enhanced LDMOS (BE-LDMOS). The proposed device utilizes the parasitic BJT present in an LDMOS to increase the drain current for a given gate voltage, resulting in a reduction in the ON-resistance by 26.2 % and improving the switching speed by 7.8 % for BE-LDMOS as compared to the comparable LDMOS. These improvements are without degradation in other performance parameters such as off state breakdown voltage and transconductance. The process steps for fabricating BE-LDMOS are same as that for LDMOS except for an additional metal contact.