Merging parallel-plate and levitation actuators to enable linearity and tunability in electrostatic MEMS

摘要

In this study, a linear electrostatic MEMS actuator is introduced. The system consists of a MEMS cantilever beam with combined parallel-plate and electrostatic levitation forces. By using these two forcing methods simultaneously, the static response and natural frequency can be made to vary linearly with the voltage. The static response shows a linear increase of 90nm/V and is maintained for more than mu m of the tip displacement. The natural frequency shows a linear increase of 16Hz/V and is maintained throughout a 2.9kHz shift in the natural frequency. This wide range of linear displacement and frequency tunability is extremely useful for MEMS sensors and actuators, which suffer from the inherent nonlinearity of electrostatic forces. A theoretical model of the system is derived and validated with experimental data. Static response, natural frequency, and frequency response calculations are performed. Merging these two mechanisms enables high oscillation branches for a wide range of frequencies with potential applications in MEMS filters, oscillators, and sensors.