Fluorescence imprint alignment using additive-type inclination moire fringes

摘要

It was studied whether additive-type fluorescence inclination moire fringes were observed during imprint alignment by fluorescence microscopy using a pair of two periodical concave-line patterns with a long and short pitch of p(1) and p(2) prepared on silica mold and silicon substrate surfaces without any optically functional layer. A fluorescent liquid was sandwiched between the surfaces to fill into the concave lines and excited by exposure to visible light of 530-538 nm. In the detection wavelength range of 570-700 nm, additive-type fluorescence inclination moire fringes generated from the place where bright concave lines with p(1) on the substrate were overlaid with bright concave lines with p(2) on the mold. The relationship of the mold-substrate angle deviation (theta) with the angle deviation (Psi) of an additive-type inclination moire fringe was equal to the correlation of. with the angle deviation (phi) of a multiplicative-type inclination moire fringe. (C) 2020 The Japan Society of Applied Physics