机译:富碳低k薄膜的按比例缩小铜互连的均匀性和可靠性的改善
LSI Research Laboratory, Renesas Electronics Corporation, 1120 Shimokuzawa, Chuo-ku, Sagamihara 252-5298, Japan;
LSI Research Laboratory, Renesas Electronics Corporation, 1120 Shimokuzawa, Chuo-ku, Sagamihara 252-5298, Japan;
LSI Research Laboratory, Renesas Electronics Corporation, 1120 Shimokuzawa, Chuo-ku, Sagamihara 252-5298, Japan;
LSI Research Laboratory, Renesas Electronics Corporation, 1120 Shimokuzawa, Chuo-ku, Sagamihara 252-5298, Japan;
LSI Research Laboratory, Renesas Electronics Corporation, 1120 Shimokuzawa, Chuo-ku, Sagamihara 252-5298, Japan;
LSI Research Laboratory, Renesas Electronics Corporation, 1120 Shimokuzawa, Chuo-ku, Sagamihara 252-5298, Japan;
LSI Research Laboratory, Renesas Electronics Corporation, 1120 Shimokuzawa, Chuo-ku, Sagamihara 252-5298, Japan;
LSI Research Laboratory, Renesas Electronics Corporation, 1120 Shimokuzawa, Chuo-ku, Sagamihara 252-5298, Japan;
机译:孔的精确锥角控制,可实现按比例缩小的低k / Cu互连
机译:Cu / low-k互连中的热ALD TaNC膜的增强的生长和Cu扩散阻挡性能
机译:用于Cu / low-k互连的低k有机膜原位表面改性蚀刻技术
机译:用于缩小的电迁移(EM)可靠性改进的冶金处方,Cu双镶嵌互连
机译:用于高级互连的多孔低k电介质的机械可靠性:多孔低k电介质的不稳定性机理及其通过惰性等离子体引发的骨架结构再聚合的介导研究。
机译:用于进一步缩小超大型集成器件-Cu互连的等离子增强化学气相沉积SiCH膜的低k覆盖层的材料设计
机译:低k / Cu互连系统的可靠性和性能的定量预测