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Theoretical Study of Mechanical Control of Micro- and Nano-Mechanical Systems by Cavity-Induced Radiation Force

机译:腔辐射力对微纳机械系统力学控制的理论研究

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摘要

We theoretically investigate the possibility of controlling the vibration amplitude of a cantilever used in scanning probe microscopy (SPM) by cavity-induced radiation force (CIRF) exerted on the cavity mirror attached to It. It has been clarified that the amplitude of the cantilever can be decreased by one order of magnitude owing to the nonlinear dynamics induced by CIRF under weak laser Irradiation of 30 to 50μW. This mechanism would be applied to, for example, dynamical control of micro- and nano-mechanical systems, and high-sensitivity SPM based on small amplitude metrology.
机译:我们从理论上研究了通过施加在与之相连的腔镜上的腔感应辐射力(CIRF)来控制扫描探针显微镜(SPM)中使用的悬臂振动幅度的可能性。已经阐明,由于CIRF在30至50μW的弱激光照射下引起的非线性动力学,使得悬臂的振幅可以减小一个数量级。该机制将应用于例如微机械和纳米机械系统的动态控制,以及基于小幅度计量的高灵敏度SPM。

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  • 来源
    《Japanese journal of applied physics》 |2012年第6issue2期|p.06FH02.1-06FH02.3|共3页
  • 作者单位

    Nanoscience and Nanotechnology Research Center, Osaka Prefecture University, Sakai 599-8570, Japan Department of Physics and Electronics, Osaka Prefecture University, Sakai 599-8531, Japan;

    Nanoscience and Nanotechnology Research Center, Osaka Prefecture University, Sakai 599-8570, Japan Department of Physics and Electronics, Osaka Prefecture University, Sakai 599-8531, Japan;

    Nanoscience and Nanotechnology Research Center, Osaka Prefecture University, Sakai 599-8570, Japan PRESTO, Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan;

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