Explanation for the AC–DC Voltage Transfer Differences in Thin-Film Multijunction Thermal Converters on Silicon Chips at High Frequencies

摘要

In this paper, an explanation for the ac–dc voltage transfer differences at frequencies greater than 100 kHz of the standard thin-film or planar multijunction thermal converter (PMJTC) developed at the Physikalisch-Technische Bundesanstalt and fabricated on a silicon chip has been found. The simulation indicates that the capacitance of the bond pads of the heater is the reason for an increase of the ac–dc voltage transfer difference of PMJTCs with higher heater resistance to negative values. Bond pads of smaller size and larger distance are shown to improve the frequency response.