Structural Characterization and Transport Properties of Diamond Films prepared by DC Plasma Glow Discharge CVD

摘要

We present in this paper results of characterization of CVD diamond films prepared with a dc plasma glow discharge method at different methane concentrations and substrate temperatures. SEM analysis combined with x-ray diffraction measurements and micro-Raman spectroscopy have been used to determine the morphology and texture of three diamond samples prepared at a constant methane to hydrogen ratio (3.8 vol/100). The change of the morphology with substrate temperature in the range 950-1100 deg. C is consistent with reported Measurements performed on diamonds prepared by microwave-enhanced CVD.