The continuous growth of Very Large Scale Integration (VLSI) Circuits raises up importance on innovations in microelectronic structures that enables characterization, model and modeling methods, and measurement methods. Although many of those test structures, also called as Test Element Group (TEG), and test methods are highly innovative and academically interesting, they tend to be closed to public and then be forgotten. The main reason is that test structures and methods are primarily developed in fabrication sites and laboratories for each particular purpose.
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