Improved Laser Ablation Method Using Shadow Mask (Eclipse Method)

摘要

To eliminate the droplet formation during the laser ablation thin film growth process, we proposed a new laser ablation technique named "Eclipse Method", which facilitated removing this droplet problem completely. Especially, Yba_2Cu_3O_y films obtained by this method had Tc-93K and droplet-free surfaces. To achieve the Growth rate enhancement in low pressure condition and to introduce the activated species on the substrate in Eclips method, we further proposed a new composite shadow mask method, "Eclipse Angel Method".