A Novel Rescheduling Method for Dynamic Semiconductor Manufacturing Systems

摘要

This work is motivated by the need to adapt an optimal production schedule for dynamic and stochastic environments in semiconductor manufacturing systems. When unexpected events occur, such as machine breakdown and due date changes, manufacturers need to react quickly and revise the schedule accordingly. This paper presents a novel partial repair rescheduling solution that consists of a criterion and a scheduler. The former decides the segment of the original schedule to be repaired by detecting a match-up point. The impact of disturbances caused by unexpected events can be limited between the disturbing time and this match-up point. The scheduler generates a new schedule segment to replace the original and impacted one with single machine-oriented or machine-group-oriented match-up rescheduling algorithms. On practical demand, the proposed solution can be further updated due to the changing consideration of unexpected events and/or expanded performance criteria. The simulation results show that the proposed rescheduling methods have higher stability and efficiency than some well-known existing rescheduling methods.