A simulation-based experiment for comparing AMHS performance in asemiconductor fabrication facility

摘要

As the cost and complexity of constructing a semiconductornfabrication facility increases, responsive tools are needed forndesigning and planning its operations. Discrete-event simulation pairednwith design of experiments is an effective combination. This articlendemonstrates how simulation in combination with design of experiments isnused to compare the intrabay layout of two automated material handlingnsystems. The difference in stocker robot utilization, number of vehiclenmoves per hour, and average delivery time for the two intrabay layoutsnwill be compared using a fractional factorial experimental design. Thenstudy demonstrates that the distributed storage option is preferable fornmaximizing manufacturing performance. The solution procedure has generalnapplicability as a tutorial for practitioners