AMHS capacity determination model for wafer fabrication based on production performance optimization

摘要

Automatic material handling system (AMHS) is becoming more important in 300 mm wafer fabrication factories (fab). Effective and efficient design and control of AMHS has become more critical particularly in capacity planning. The major concept of the AMHS capacity determination model is to maintain the originally designed optimal production throughput or cycle time of products. In order to maintain fab's throughput or cycle time of products, WIP (work in process) portfolio of the constraint or the fastest workstation should be kept. Based on this concept, a GI/G/m queuing model based on FCFS (First-come-first-serve) dispatching rule of AMHS is applied to determine the required number of vehicles. Basically, products should be transported to the specific workstation (constraint or fastest workstation) before the workstation finishes the existing process; therefore, sufficient WIP in front of this specific workstation should be kept. Under this condition, the probability that transportation time exceeds product processing time under a certain transportation capacity level can be calculated by the proposed model. Hence, we can get the required capacity of AMHS to achieve the probability target set in advance. Due to the capacity of AMHS can be set according to the acceptable probability of non-exceeding the processing time of the constraint or fastest workstation, the level of WIP in front of this workstation can be kept. It also can be ensured that AMHS will not affect the production performance as well as keep the reasonable investment level.