A three-degrees-of-freedom micromotion in-parallel actuated manipulator

摘要

The development of a three-degree-of-freedom (DOF) micromotion in-parallel actuated manipulator is discussed. The micromotion manipulator, which has one translation and two orientation freedoms, is actuated by piezoelectric effect. A closed-form solution and an experimental verification of the forward kinematics are presented. In addition, the dynamic model of the piezoelectric actuated link was determined experimentally, providing a rational basis for the design and prismatic joint force control of the high-speed micromotion manipulator. A special configuration that approaches an optimal design, in terms of working range, rigidity, and bandwidth, is highlighted.