A full-wave analysis of a coplanar waveguiding structure with multiple dielectric layers is presented. The results of a hybrid approach that combines the finite-element method and the conformal-mapping technique are compared with those of the spectral-domain approach. Numerical results for effective dielectric constants, characteristic impedances, current distributions, and field distributions for various multilayer coplanar line structures are presented and discussed. The computed results are compared with the available quasi-static ones.
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