Laminate magnetic heads with locally thickness modified thin film cores

摘要

Laminate magnetic heads with locally thickness modified cores, using electron-beam evaporated FeAlSi films, have been successfully developed. Experimental results support the numerical analyses indicating that these thickness modified cores enable magnetic heads to be more efficient than corresponding heads with uniform thickness cores. Both abrasive machining and anisotropic dry-etching, preferably activated by introducing oxygen, can easily modify the core thickness when they are combined with our head fabrication process characterized by the V-shape grooves.