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Efficient 3-D extraction of interconnect capacitance considering floating metal fills with boundary element method

机译:考虑边界填充法的考虑浮动金属填充的互连电容高效3D提取

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Inserting dummy (area fill) metals is necessary to reduce the pattern-dependent variation of dielectric thickness in the chemical-mechanical polishing (CMP) process. Such floating dummy metals affect interconnect capacitance and, therefore, signal delay and crosstalk significantly. To take the floating dummies into account, an efficient method for three-dimensional (3-D) capacitance extraction based on boundary element method is proposed. By introducing a floating condition into the direct boundary integral equation (BIE) and adopting an efficient preconditioning technique, and the quasi-multiple medium (QMM) acceleration, the method achieves very high computational speed. For some typical structures of area fill, the presented algorithm has shown over 1000/spl times/ speedup over the industry-standard Raphael while preserving high accuracy. Compared with the recently proposed PASCAL in the work of Park et al. (2000), the proposed method also has about ten times speedup. Since the dummies are not regarded as normal electrodes in capacitance extraction, the proposed method is much more efficient than the conventional method, especially in cases with a large number of floating dummies.
机译:插入虚拟(区域填充)金属对于减少化学机械抛光(CMP)过程中介电层厚度随图案而引起的变化是必要的。这种浮动的伪金属会影响互连电容,因此会严重影响信号延迟和串扰。考虑到浮动假人,提出了一种基于边界元法的三维(3-D)电容提取的有效方法。通过将浮点条件引入直接边界积分方程(BIE)中并采用有效的预处理技术和准多重介质(QMM)加速,该方法可以实现很高的计算速度。对于某些典型的区域填充结构,本文提出的算法在保持高精度的同时,已显示出超过行业标准Raphael的1000 / spl次/提速。与Park等人最近提出的PASCAL相比。 (2000年),提出的方法也有大约十倍的加速。由于假人在电容提取中不被视为正常电极,因此该方法比常规方法高效得多,尤其是在浮空假人较多的情况下。

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