Ultrafast Large-Scale Chemical Sensing With CMOS ISFETs: A Level-Crossing Time-Domain Approach

摘要

The introduction of large-scale chemical sensing systems in CMOS which integrate millions of ISFET sensors have allowed applications such as DNA sequencing and fine-pixel chemical imaging systems to be realised. Using CMOS ISFETs provides advantages of digitisation directly at the sensor as well as correcting for non-linearity in its response. However, for this to be beneficial and scale, the readout circuits need to have the minimum possible footprint and power consumption. Within this context, this paper analyses an ISFET based pH-to-time readout using an inverter in the time-domain as a level-crossing detector and presents a 32x32 array with in-pixel digitisation for pH sensing. The inverter-based sensing pixel, controlled by a triangular waveform, converts the pH response into a time-domain signal whilst also compensating for sensor offset and thus resulting in an increase in dynamic range. The sensor pixels interface to a 15-bit asynchronous column-wise time-to-digital converter (TDC), enabling fast asynchronous conversion whilst using minimal silicon area. Parallel outputs of 32 TDC interfaces are serialised to achieve fast data throughput. This system is implemented in a standard 0.18 mu m CMOS technology, with a pixel size of 26 mu m x 26 mu m and a TDC area of 26 mu mx180 mu m. Additionally, we investigate the use of additional offset compensation by having half of the array implemented with the floating gate tied down via a well diode. Measured results demonstrate the system is able to sense reliably with an average pH sensitivity of 30 mV/pH, whilst being able to compensate for sensor offset by up to +/- 7 V. A resolution of 0.013 pH is achieved and noise measurements showan integrated noise of 0.08pH within 2-500 Hz and SFDR of 42.6 dB. The total power consumption of the system is measured to be 11.286 mW when operating at a high frame rate of 1 KFPS.