Fabrication and experimentation of vertical spring-type micromirrorusing shielding screen structure

摘要

A vertical spring-type micromirror was fabricated using anshielding screen structure. Unlike the micromirror that was fabricatednusing only shadow evaporation, the fabricated vertical springs in thisncase are well defined, using both shadow evaporation and a shieldingnscreen structure. The static and dynamic characteristics of micromirrornare measured by means of contact-free optical measurement system. Thendownward threshold voltage is 16 V and the step response time is 16.8nΜs. Images are projected onto a screen using a simple projectionnsystem with the fabricated micromirror array