Fabrication of vertical-spring-type micromirror with SiO2 shielding screen and composite-layered mirror plate

摘要

Abstract: A vertical spring-type micromirror was fabricated using a SiO$-2$/ shielding screen structure. The fabricated vertical springs are well defined but the mirror plate is bent because the mirror plate is composed of SiO$-2$/ and aluminum layers. To obtain a flat mirror plate, the stress of SiO$-2$/ and aluminum is analyzed and the bending deflection of mirror plate's edge is measured. The measured deflection varies with the thickness of aluminum. Another SiO$-2$/ layer on the mirror aluminum improved the flatness of mirror plate. !9