机译:MOEMS,MEMS和NEMS的晶圆级异构集成
Microsystem Technology Laboratory, School of Electrical Engineering, KTH-Royal Institute of Technology, Sweden;
Microelectromechanical system (MEMS); More-than-Moore; microoptoelectromechanical system (MOEMS); nanoelectromechanical system (NEMS); photonic integration; self-assembly; wafer-level heterogeneous integration;
机译:客座社论:MEMS / NEMS / MOEMS,RF MEMS和BioMEMS的理论与实践
机译:MEMS / NEMS / MOEMS的理论与实践RF MEMS和BioMEMS
机译:特邀嘉宾社论:MEMS,NEMS和MOEMS的理论与实践
机译:用于MEMS和NEMS的晶圆级异构3D集成
机译:AlN MEMS轮廓模式谐振器和CMOS电路的异构集成
机译:超越CMOS:III-V器件RF MEMS和其他异种材料/器件与Si CMOS的异构集成以创建智能微系统
机译:用于MEMS和NEMS的晶圆级异构3D集成