MEMS晶圆级测试系统现状及未来展望

摘要

Wide application of MEMS products makes it necessary to study on wafer level testing technology. Domestic& international present situation of hardware of MEMS wafer level test system and testing technology of MEMS wafer level are analyzed. Referring to RM8096/8097 reference material( RM),a preliminary solution for calibration problem of system is given. Trend of standardization and modularization that testing system can expand in the future is pointed out.%微机电系统（ MEMS）产品的广泛应用使得晶圆级测试技术必要性日益凸显。分析了国内和国际MEMS晶圆级测试系统硬件和MEMS晶圆级测试技术的现状。参照国际上利用RM8096/8097标准物质（ RM）对MEMS产品进行计量测试的方法，给出了针对我国现有MEMS晶圆级测试系统校准问题的初步解决方案。并指出了该类测试系统今后向着标准化模块化方向发展的趋势。