SOI technology for the CHz era

摘要

Silicon-on-insulator(SOI) CMOS offers a 20-35/100 performance gain over bulk CMOS. High-performance microprocessors using SOI CMOS have been commercially available since 1998. as the technology moves to the 0.13 -μm generation, SOI is being used by more companies, and its application is spreading to lower-end microprocessors and SRAMs. In this paper, after giving a short history of SOI in IBM, we describe the reasons for performance Improvement with SOI, and its scalability to The 0.1-μm generation and beyond.