EPR and UV-Raman study of BPSG thin films f structure and defects

摘要

Borophosphosilicate glass (BPSG) films produced by Sub-Atmospheric Pressure Chemical Vapor Deposition (SACVD) with different B and P concentrations have been investigated by ultra-violet (UV) Raman and electron paramagnetic resonance (EPR) spectroscopies. We observe a correlation between the main feature of the UV-Raman spectra in the as deposited films, the line at 1326(2) cm~-1 attributed to the stretching vibrations of the P=O double bond, and the spin resonance signals attributed to the stable phosphorus - oxygen-hole - center (POHC ) created after room temperature X-ray irradiation. The intensity of the P=O line as well as the intensity of the POHC EPR signal depend on the B content. The metastable configuration, POHC~m, has been also observed by EPR. The B content does not affect significantly the concentration of this paramagnetic defect.