104 GHz signals measured by high frequency scanning force microscope test system

摘要

A newly-developed high frequency scanning force microscope (HFSFM) test system combines both high spatial and temporal resolution. And enables functional probing and failure analysis of monolithic microwave integrated circuits (MMICs). The upper frequency limit of this test system. Originally 20 GHz, was extended to <100 GHz using nonlinear transmission lines. With all components packaged in a simple arrangement using 3.5 mm microwave coaxial connectors. Even with this severe limitation. On-chip measurement of 104 GHz signals were performed.