HfO/sub 2/ and ZrO/sub 2/ alternative gate dielectrics for silicon devices by liquid injection chemical vapour deposition

摘要

Capacitance-voltage measurements are reported on MOSC devices with ZrO/sub 2/ and HfO/sub 2/ gate dielectrics fabricated using novel zirconium and hafnium alkoxide volatile mononuclear complexes. These complexes are significantly less reactive to air and moisture than existing Zr and Hf alkoxides. Feasibility is shown of using this liquid injection chemical vapour deposition method with these precursors for high-k gate dielectric realisation for submicron MOS devices.