The spreading resistance error in the vertical Kelvin test resistor structure for the specific contact resistivity

摘要

The spreading resistance error in the vertical Kelvin test resistor (VTR) structure is studied based on an analytic approach. It is found that it is always less than the error existing in the horizontal test structures and can be expressed as the product of the sheet resistance and the square of the junction depth of the conductor resistor divided by a factor approximately equal to 2.