Thermionic-emission-based barrier height analysis for precise estimation of charge handling capacity in CCD registers

摘要

In designing charge-coupled device (CCD) image sensors, it is essential to be able to estimate charge handling capacity. Because electrons have thermal energy, storing electrons in a well in a CCD register requires a sufficient potential barrier height to keep them from overflowing. As the quantity of electrons in a well depends on the barrier height, knowledge of this height is indispensable for precise estimation of the charge handling capacity. The authors have derived an expression describing the barrier height on the basis of thermionic emission, assuming current coefficient I/sub 0/ and well capacitance C. We derived the current coefficient I/sub 0/ and well capacitance C with computer simulations and from the results estimate the magnitude of the barrier height for a typical Vertical-CCD (V-CCD) structure. We have also examined barrier height dependence on structural parameters. Finally, we determined the barrier heights experimentally, and our results support the values obtained in the simulation.