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首页> 外文期刊>Electron Devices, IEEE Transactions on >Performance Evaluation of In0.53Ga0.47As Esaki Tunnel Diodes on Silicon and InP Substrates
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Performance Evaluation of In0.53Ga0.47As Esaki Tunnel Diodes on Silicon and InP Substrates

机译:In 0.53 Ga 0.47 作为Esaki隧道二极管在硅和InP衬底上的性能评估

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摘要

InGaAs Esaki tunnel diodes grown by molecular beam epitaxy on an Si substrate via a graded buffer and control InGaAs Esaki tunnel diodes grown on an InP substrate are compared in this paper. Statistics are used as a tool to show peak-to-valley ratio for the III–V on Si sample and the control that perform similarly below cm. The existence of a critical device area suggests the potential to utilize III–V on Si for other deeply scaled tunnel devices.
机译:本文比较了分子束外延通过梯度缓冲剂在Si衬底上生长的InGaAs Esaki隧道二极管和在InP衬底上生长的对照InGaAs Esaki隧道二极管。统计数据用作显示Si样品上III–V峰-谷比的工具,以及在cm以下表现相似的对照。关键器件区域的存在表明可能将Si上的III–V用于其他深度扩展的隧道器件。

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