Impact of Interface Traps and Surface Roughness on the Device Performance of Stacked-Nanowire FETs

摘要

In stacked-nanowire field-effect transistors (stacked-NW FETs), the effect of nanowire surface roughness (NWSR) and random interface traps (RIT) on device performance variation is investigated. The 3-D NWSR profile is applied to the surface of the nanowires, and then, the interface traps are generated and randomly placed in the interfacial layer between the silicon and high-k. First, the interaction between NWSR and RIT in a single-NW FET is investigated; the NWSR-induced performance varia- tion is not independent on the RIT-induced variation. Then, the correlation of NWSR profiles and RIT in stacked-NW FETs is explored. The degree of correlation between the NWSR profiles of stacked-NWs is varied in three cases: 1) positively correlated; 2) negatively correlated; and 3) uncorrelated. Without RITs, the NWSR-induced performance variation of the stacked-NW FETs dramatically increases as the NWSR profiles of the nanowires become positively correlated. However, with RITs, the more positively correlated the NWSR profiles of the nanowires, the larger is the variation that the interface traps induce. Interface traps barely affect the variation of the negatively correlated NWSR profiles. The variation of current slightly decreases because interface charge scattering degrades the mobility of the carriers.