N-channel Si/SiGe MODFETs: effects of rapid thermal activation on the DC performance

摘要

Si/SiGe MODFETs with P- and As-implanted source and drain contacts were fabricated. The effect of rapid thermal activation (RTA) on the DC performance of those devices was studied. The RTA temperature determines the device operation, i.e. a 550-750 degrees C treatment yields enhancement and a 900 degrees C annealing results in depletion mode. Extremely high ratios of the 77- to the 300 K transconductance ( approximately=4.5) were found. Low thermal budget RTA ( approximately=600 degrees C) is essential to eliminate degradation of the channel mobility and to achieve a significant increase of the 77 K transconductance.