Improved BRT structures fabricated using SIMOX technology

摘要

The SIMBRT is a new power device in which SIMOX technology is used to isolate the P-channel turnoff MOSFET resulting in improved cathode injection efficiencies and higher maximum controllable current densities when compared to the conventional BRT. In this paper, experimentally measured characteristics on four novel SIMBRT structures fabricated using a 9-mask SIMOX smart power process are presented, and their performance is compared with conventional BRT structures fabricated alongside. The lowest on-state voltage drop and highest maximum controllable current density are demonstrated to occur for the structure with the smallest cell pitch.