Diamond-Like Carbon (DLC) Liner: A New Stressor for P-Channel Multiple-Gate Field-Effect Transistors

Tan K.-M.; Fang W.-W.; Yang M.; Liow T.-Y.; Lee R. T.-P.; Balasubramanian N.; Yeo Y.-C.

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Diamond-Like Carbon (DLC) Liner: A New Stressor for P-Channel Multiple-Gate Field-Effect Transistors

机译：类金刚石碳（DLC）衬垫：P沟道多栅极场效应晶体管的新型应力源

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We report the first demonstration of a p-channel multiple-gate (trigate) FinFET with a liner stressor comprising diamond-like carbon (DLC) film. We also report on the detailed process that enables the adhesion of DLC with ultrahigh compressive stress on t

机译：我们报告了带有衬里应力源的p沟道多栅极（trigate）FinFET的首次演示，该线性应力源包括类金刚石碳（DLC）膜。我们还报告了能够使DLC在t上具有超高压缩应力的粘附过程的详细过程

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《IEEE Electron Device Letters》 |2008年第7期|p.750-752|共3页
作者
Tan K.-M.; Fang W.-W.; Yang M.; Liow T.-Y.; Lee R. T.-P.; Balasubramanian N.; Yeo Y.-C.;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类一般性问题;
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专利

1. Ultra High-Stress Liner Comprising Diamond-Like Carbon for Performance Enhancement of p-Channel Multiple-Gate Transistors [J] . Tan K.-M., Yang M., Liow T.-Y., Electron Devices, IEEE Transactions on . 2009,第6期

机译：包含类似于金刚石的碳的超高应力衬垫，可增强p沟道多栅极晶体管的性能
2. Performance Benefits of Diamond-like Carbon Liner Stressor in Strained P-Channel Field-Effect Transistors With Silicon–Germanium Source and Drain [J] . Tan K.-M., Yang M., Fang W.-W., Electron Device Letters, IEEE . 2009,第3期

机译：类金刚石碳衬里应力源在带硅锗源和漏极的应变P沟道场效应晶体管中的性能优势
3. A High-Stress Liner Comprising Diamond-Like Carbon (DLC) for Strained p-Channel MOSFET [J] . Tan K.-M., Zhu M., Fang W.-W., IEEE Electron Device Letters . 2008,第2期

机译：用于应变p沟道MOSFET的含金刚石样碳（DLC）的高应力衬垫
4. A New Liner Stressor with Very High Intrinsic Stress (> 6 GPa) and Low Permittivity Comprising Diamond-Like Carbon (DLC) for Strained P-Channel Transistors [C] . Kian-Ming Tan, Ming Zhu, Wei-Wei Fang, IEEE International Electron Devices Meeting . 2007

机译：一种具有非常高的内在应力（> 6GPa）和低介电常数，包括用于应变的P沟道晶体管的金刚石碳（DLC）的低介质
5. Advanced Germanium-Tin P-Channel Metal-Oxide-Semiconductor Field-Effect Transistors [D] . Lei, Dian. 2018

机译：先进的锗 - 锡P沟道金属氧化物半导体场效应晶体管
6. Performance enhancement of multiple-gate ZnO metal-oxide-semiconductor field-effect transistors fabricated using self-aligned and laser interference photolithography techniques [O] . Hsin-Ying Lee, Hung-Lin Huang, Chun-Yen Tseng 2014

机译：使用自对准和激光干涉光刻技术制造的多栅极ZnO金属氧化物半导体场效应晶体管的性能增强
7. Performance enhancement of multiple-gate ZnO metal-oxide-semiconductor field-effect transistors fabricated using self-aligned and laser interference photolithography techniques [O] . Hsin-Ying Lee, Hung-Lin Huang, Chun-Yen Tseng 2014

机译：使用自对准和激光干涉光刻技术制造的多栅极ZnO金属氧化物半导体场效应晶体管的性能增强

Diamond-Like Carbon (DLC) Liner: A New Stressor for P-Channel Multiple-Gate Field-Effect Transistors

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