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Tackling chemical etching and its mechanisms of polyphenolic composites in various reactive low temperature plasmas

机译:在各种反应性低温等离子体中处理化学蚀刻及其对多酚复合材料的机理

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Selective removal of the surface polymer layer from glass filled polyphenolic composites is important while using them for applications which demand good thermal and electrical insulation properties. Inductively coupled low temperature plasma discharge was verified to facilitate chemical etching to selectively remove the surface polymer from the glass filled polyphenolic composite. The etching rate inside the plasma was compared with commercially important feeding gases including H _(2) , N _(2) , O _(2) and NH _(3) as a function of discharge power. The protruding surface polymer was removed in volatile molecular fragments, whereas the glass additives stayed unaffected. The etching rate is shown to increase as a function of applied power inside all used gas discharges. Irrespective of the applied power, O _(2) plasma displayed the highest etching rate. Furthermore, by combining optical emission spectroscopy (OES) and X-ray photoelectron spectroscopy (XPS) analyses, the work is extended to mechanistically present the possible chemical pathways which lead to creation of various functional groups on the surface during the plasma–surface interactions. This gives a new outlook towards the future applications of low temperature plasma processing in composite industry for surface modification and selective etching.
机译:从玻璃填充的多酚复合材料选择性除去表面聚合物层,同时使用它们对于需要良好的热和电绝缘性能的应用是重要的。验证电感耦合的低温等离子体放电以促进化学蚀刻以选择性地从玻璃填充的多酚复合材料中除去表面聚合物。将等离子体内的蚀刻速率与商业上重要的进料气体进行比较,包括H _(2),N _(2),O _(2)和NH _(3)作为放电功率的函数。在挥发性分子片段中除去突出表面聚合物,而玻璃添加剂保持不受影响。显示蚀刻速率随着所有使用的气体排放而内部的施加电力的函数增加。无论应用功率如何,O _(2)等离子体显示出最高的蚀刻速率。此外,通过组合光学发射光谱(OES)和X射线光电子谱(XPS)分析,该工作延伸以机械地呈现可能的化学途径,这导致在等离子体表面相互作用期间在表面上产生各种官能团。这为降低温度等离子体加工在复合工业中的综合性和选择性蚀刻来提供了新的前景。

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