Evaluation of Nanoimprinting Multilayer Lift-off Process using Spin-on-glass for Nanogap Electrode Array

摘要

Nanogap electrodes are expected to aid in the study of the electrical properties of single molecules and nanoparticles, and have also been applied to non-volatile memory. However, an electrode that exhibits a large area and good reproducibility is yet to be found. We investigate the nanogap fabrication method combining UV nanoimprint lithography and electromigration. A three-layer lift-off process, using spin-on-glass as an intermediate layer with high etching selectivity, is evaluated. Nanowire array patterns are fabricated in a 9-mm square in the process, which demonstrate the nanogap characteristics of resistance switching effects.