Rewriting Process of Lower Electrical Resistance Lines on TiO₂ Film using Methods of Whitening with Electric Furnace and Darkening with Femtosecond Laser

摘要

Rewrit ing process of lower electrical resistance lines on a titanium dio xide (TiO 2 ) film was de- veloped. In this pro cess, lo wer electrical resistance lines were written o n a TiO 2 film wit hout pro- ducing the ir surface to pography changes by fe mtose cond laser irradiation. B y heating wit h a n elec- trical furnace under air, the electrical resist ance of t hese lines was co me back to the higher re- sista nce with no topography changes. This result indicated t hat the lines could be erased by t he heat- ing me tho d unde r air. When the erasing-treated area was irrad iated w ith a femtosecond laser, the lower electrical resistance lines cou ld be rewritten wit h no to pography changes of the film surface.