Processing and electrical properties of lead magnesium niobate-lead titanate (PMN-PT) thin films by pulsed laser deposition.

摘要

;In-situ growth of PMN and PMN-PT films by pulsed laser deposition is studied. The effects of substrate temperature, ambient oxygen pressure, substrate and surface morphology of electrode materials (metal and metal oxide) on the film deposition, were investigated. The electrical and dielectric properties of the films are evaluated at room and elevated temperature. Preliminary studies of the electromechanical properties of the PMN-PT films are discussed.;Ablation utilized a KrF