Performance Improvisation of Cantilever-type Silicon Micro AccelerationSensors Using Stress Concentration Regions Technique

摘要

Acceleration sensors find applications in missile and competent munitions subsystems.Cantilever-type sensor's sensitivity and bandwidth are dependant on material properties of? thecantilever and structure of proof mass. It is always desired to design a sensor as sensitive aspossible but also maintaining higher bandwidth. In piezoresistive (cantilever-type) accelerometers,various techniques were employed by designers to enhance their sensitivity and bandwidth.Most of these techniques are usually focused on shape and size of either cantilever or proofmass. This paper presents a concept of creating stress concentration regions (SCRs) on thecantilever for enhancing its sensitivity. Five types of structures were simulated to study thebehaviour of piezoresistive sensors with SCRs implementation. Use of SCRs results in substantialincrease in the sensitivity, which is of the order of 1.85 times the nominal sensitivity. It was aimedat maximising sensor's performance factor, which is the product of sensor bandwidth andsensitivity. This study gives new dimension to the ways of improving performance of cantilever-type inertial piezoresistive sensor.