Surface Characteristics of Nitrogen and Argon Plasma Immersion Ion Implantation of Cu-Zr-Al Bulk Metallic Alloy

摘要

Plasma Immersion ion implantation (PIII) offers a technique for metallic glasses to improve the surface properties. The (Cu₅₀Zr₅₀)₉₂Al₈ bulk metallic glass (BMG) has relatively high glass forming ability (GFA), it is chosen for surface modification experiment. The influences of nitrogen and argon ion implantation on (Cu₅₀Zr₅₀)₉₂Al₈ BMG were investigated. After PIII, the surfaces of implanted samples remain amorphous except that ZrO₂ formed on the surface. We observed Cu and Al segregation beneath the top oxide layer after ion implantation.