Microano-mechanical sensors and actuators based on SOI-MEMS technology - IOPscience

摘要

MEMS (micro-electro-mechanical systems) technology has undergone almost 40 years of development, with significant technology advancement and successful commercialization of single-functional MEMS devices, such as pressure sensors, accelerometers, gyroscopes, microphones, micro-mirrors, etc. In this context of MEMS technology, this paper introduces our studies and developments of novel microano-mechanical sensors and actuators based on silicon- on-insulator (SOI)-MEMS technology, as well as fundamental research on piezoresistive effects in single-crystal silicon nanowires (SiNWs). In the first area, novel mechanical sensors, such as 6-DOF micro-force moment sensors, multi-axis inertial sensors and micro-electrostatic actuators developed with SOI-MEMS technology will be presented. In the second area, we have combined atomic-level simulation and experimental evaluation methods to explain the giant piezoresistive effect in single crystalline SiNWs along different crystallographic orientations. This discovery is significant for developing more highly sensitive and miniaturized mechanical sensors in the near future.